LA3024C RFT for a Direct Write Laser Lithography Tool for University College Cork
Education Procurement Service (EPS) · Ireland
Key facts
- Contract value
- €697,230
- Awarded
- 21 Feb 2025
- Contract starts
- 21 Feb 2025
- Procedure
- Open procedure
- Buyer type
- Education
Awarded to
| Supplier | Value |
|---|---|
| Heidelberg Instruments Mikrotechnik GmbH | €697,230 |
Description
Tenders are sought for the supply delivery, installation and commissioning of a Direct Write Laser Lithography Tool for University College Cork. The new lithography tool will enhance the capabilities at the Tyndall National Institute for the advanced heterogeneous of semiconductor devices. We invite proposals for an advanced direct write laser lithography tool that is capable of resolving features down to 0.3um. The system should also be capable of grayscale lithography enabling the creation of complex 3D microstructures for advanced research and development applications. This equipment will be essential for filling the gap between our current optical lithography and e-beam lithography capabilities. The ideal tool will offer precision, reliability, and efficiency to meet the requirements for the exposure of samples from coupon size to 200mm wafers. Vendors with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.
Categories (CPV)
- 38000000 Laboratory, optical and precision equipments (excl. glasses)
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