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Tenfell
Awarded contract
Published 12 Dec 2022

Provision of a 300mm Capable High Throughput Electron Beam Lithography System

UNIVERSITY OF SOUTHAMPTON · South East

Key facts

Contract value
£7,461,509
Awarded
08 Nov 2022
Contract starts
02 Dec 2022
Contract ends
01 Dec 2038
Procedure
Open procedure (above threshold)
Buyer type
Education

Awarded to

SupplierValue
JEOL(U.K.)LIMITED£7,461,509

Description

The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.

The instrument to be procured will directly replace a JEOL JBX9300FS which suffered a failure in 2021 (the removal of which is an optional requirement of this tender). The user base for the machine is approximately 40 users.

Tenders or requests to participate must be submitted electronically via the University's electronic tendering portal, In Tend, found at the following address: https://in-tendhost.co.uk/universityofsouthampton/aspx/home

Categories (CPV)

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