Provision of a 200mm Stylus Profiler

The University has seen increased success in recent years with the securing of ongoing research works and projects.

Along with the increased work, this tender requirement is for a 200mm Long Travel Stylus Profiler. The acquisition of this equipment will support the facility's transition towards being fully 200mm wafer capable and will provide a method of measuring 3D wafer stress. The University of Southampton Nanofabrication Facility would like to move towards being fully 200mm wafer capable.

The acquisition of the Stylus Profiler, is essential to the University of Southampton especially the Cleanroom to allow validation of complex processes. This equipment will strengthen the core metrology in this area and future proofing of the building blocks of the facility that allow our users to reach far more advanced devices and functionality. One of the core measurements include determining the thickness of deposited and etched layers in a cleanroom.

Full specification can be found in Appendix 1

Additional information: The University is utilising an electronic tendering tool (In-Tend: https://in-tendhost.co.uk/universityofsouthampton) to manage this procurement and to communicate with bidders. All documentation in relation to this tender can be downloaded from the In-Tend portal.

Bidders are advised that there will be no hard copy documents issued to organisations and all communications with the University including the submission of PQQ and/or Invitation to Tender Responses will be conducted via the In-Tend portal. Regular monitoring of the portal is the responsibility of the bidder.

If you are not already registered as a supplier with the University of Southampton, you will need to register in In-Tend in order to access the tender documentation.

Once you have logged in as a supplier: click on 'Tenders'; locate the relevant project; and click 'View Details'. Once you are in the project screen, you will be able to register your company against the project and access all documentation by clicking 'Express Interest'.

Bidders are advised that formal expressions of interest in the project must be by way of completion and return of the relevant Pre-Qualification (if applicable) or Invitation to Tender documents via the In-Tend portal.

Further instructions for the submission of Invitation to Tender responses are below. To submit your return, please follow the instructions below: 1. Log In 2. Click 'Tenders' 3. Locate the relevant project 4. View Details 5. Click on the tab relating to the relevant project stage (e.g. 'Invitation to Tender') 6. Click on the 'Attach Documents' button and upload your return. 7. Check ALL your response documents are uploaded and displayed in the "My Tender Return" panel. The system will only permit your organisation to make one return. 8. Click the red "Submit Return" button. Please note that, to preserve the integrity of the tendering procedure, all queries must made be via the correspondence function within the In-Tend portal.

In accordance with Regulation 50, paragraph (2) of the Public Contracts Regulations 2015 and subject to Article 5 and Annex 5, Part D (13) of Directive 2014/24/EU of the European Parliament and of the Council (if applicable), the University intends to publish the value of any resulting contract at the award stage, and reserves the right to do so. By submitting a tender response, bidders are consenting to publication of this information unless otherwise agreed in advance with the University.

Due to the nature of this project, it has been deemed unsuitable for division into lots. The risk of dividing the requirement would render the execution of the contract excessively technically difficult, not cost effective and would undermine the proper execution of the contract.