LA2972C- UCC- RFT for the Supply of a High Aspect Ratio Etcher
Education Procurement Service (EPS) · Ireland
Key facts
- Contract value
- €900,000
- Awarded
- 23 Sep 2025
- Contract starts
- 23 Sep 2025
- Contract ends
- 23 Sep 2029
- Procedure
- Open procedure
- Buyer type
- Education
Awarded to
| Supplier | Value |
|---|---|
| KLA Corporation | €900,000 |
Description
Tenders are sought for the supply delivery, installation and commissioning of a High Aspect Ratio Etcher for University College Cork. The new etcher will enhance the capabilities at the Tyndall National Institute for the advanced heterogeneous of semiconductor devices. We invite proposals for an advanced etching system capable of performing high aspect ratio silicon (Si) etching using the Bosch process. This equipment will be essential for etching deep Si trenches, facilitating the creation of through silicon vias (TSVs) that are critical for heterogeneous integration. The ideal tool will offer precision, reliability, and efficiency to meet the requirements for the etching of both 100mm and 200mm wafers. Vendors with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.
Categories (CPV)
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